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The new generation of single chip integrated temperature and humidity integrated sensor chip independently designed and developed by Zhongke Galaxy Core. The high-sensitivity MEMS humidity sensor is integrated on the silicon based CMOS wafer, and the temperature compensation and calibration data are integrated in a circuit. The temperature precision can reach ± 0.1 ℃, the humidity precision can reach ± 3% RH, and the fastest temperature conversion speed under 16 bit resolution is 2.5ms. The good precision, reliability, consistency, and anti-interference ability meet the development trend of chips under the new situation, and are very suitable for power, consumer electronics, Major appliance, cold chain transportation Application scenarios such as industrial control and wearable electronics.